Inventor
KABASAWA MITSUAKI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “KABASAWA MITSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO EATON NOVA
7 patentsUS6794661B2Sep 21, 2004
Ion implantation apparatus capable of increasing beam current
SUMITOMO EATON NOVA37 citations91
US6573517B1Jun 3, 2003
Ion implantation apparatus
SUMITOMO EATON NOVA46 citations91
US6984833B2Jan 10, 2006
Ion implanter and method for controlling the same
SUMITOMO EATON NOVA14 citations84
US6797968B2Sep 28, 2004
Ion beam processing method and apparatus therefor
SUMITOMO EATON NOVA15 citations82
US7138641B2Nov 21, 2006
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
SUMITOMO EATON NOVA8 citations73
US6720563B1Apr 13, 2004
Ion implantation apparatus and ion implantation method
SUMITOMO EATON NOVA12 citations73
US6635889B2Oct 21, 2003
Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
SUMITOMO EATON NOVA7 citations73
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD
7 patentsUS9390890B2Jul 12, 2016
High-energy ion implanter
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD3 citations72
US9368327B2Jun 14, 2016
High-energy ion implanter
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD3 citations72
US9236222B2Jan 12, 2016
Ion implantation apparatus and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD2 citations62
US9355847B2May 31, 2016
High-energy ion implanter
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD2 citations61
US9343262B2May 17, 2016
Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD0 citations51
US9384944B2Jul 5, 2016
Ion implanter and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD0 citations40
US9208991B1Dec 8, 2015
Ion implantation apparatus
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD0 citations40
SEN CORP
6 patentsUS7361892B2Apr 22, 2008
Method to increase low-energy beam current in irradiation system with ion beam
SEN CORP12 citations84
US8987690B2Mar 24, 2015
High-energy ion implanter
SEN CORP4 citations72
US8952340B2Feb 10, 2015
High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision
SEN CORP5 citations72
US7718980B2May 18, 2010
Beam processing system and beam processing method
SEN CORP5 citations62
US7755067B2Jul 13, 2010
Ion implantation apparatus and method of converging/shaping ion beam used therefor
SEN CORP6 citations61
US9208996B2Dec 8, 2015
Ion implantation apparatus and ion implantation method
SEN CORP0 citations41
SEN CORP AN SHI & AXCELIS CO
4 patentsUS7351987B2Apr 1, 2008
Irradiation system with ion beam
SEN CORP AN SHI & AXCELIS CO20 citations91
US7429743B2Sep 30, 2008
Irradiation system ion beam and method to enhance accuracy of irradiation
SEN CORP AN SHI & AXCELIS CO13 citations83
US7982192B2Jul 19, 2011
Beam processing apparatus
SEN CORP AN SHI & AXCELIS CO6 citations61
US7851772B2Dec 14, 2010
Ion implantation apparatus and ion implantation method
SEN CORP AN SHI & AXCELIS CO6 citations61
SEN CORP AN SHI AND AXCELIS CO
4 patentsUS7276711B2Oct 2, 2007
Beam space-charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO11 citations83
US7315034B2Jan 1, 2008
Irradiation system with ion beam/charged particle beam
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7304319B2Dec 4, 2007
Wafer charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7687782B2Mar 30, 2010
Electrostatic beam deflection scanner and beam deflection scanning method
SEN CORP AN SHI AND AXCELIS CO3 citations61