Inventor
GRAEGER VOLKER
DE3 patents
Patents
3 patentsUS5164338ANov 17, 1992
Method of manufacturing a polycrystalline semiconductor resistance layer of silicon on a silicon body and silicon pressure sensor having such a resistance layer
PHILIPS CORP31 citations89
US4984046AJan 8, 1991
Silicon pressure sensor having a resistance layer of polycrystalline semicondutor
PHILIPS CORP9 citations71
US5024097AJun 18, 1991
Pressure sensor comprising a silicon body
PHILIPS CORP16 citations70