Inventor

KAMEI SHIGENORI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAMEI SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US8016976B2Sep 13, 2011

Film removing device and film removing method

TOKYO ELECTRON LTD11 citations79

US8343284B2Jan 1, 2013

Film removing device and film removing method

TOKYO ELECTRON LTD0 citations47

DEGUCHI MASATOSHI

1 patent

US8707893B2Apr 29, 2014

Substrate treatment system, substrate treatment method, and non-transitory computer storage medium

DEGUCHI MASATOSHI2 citations54