Inventor
OOISHI KOTARO
JP5 patents
Patents
5 patentsUS9378940B2Jun 28, 2016
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD9 citations82
US8016976B2Sep 13, 2011
Film removing device and film removing method
TOKYO ELECTRON LTD11 citations79
US8343284B2Jan 1, 2013
Film removing device and film removing method
TOKYO ELECTRON LTD0 citations47
US10867814B2Dec 15, 2020
Liquid processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39
US9922849B2Mar 20, 2018
Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof
TOKYO ELECTRON LTD0 citations37