P

Inventor

SCHILLKE FRANK

DE8 patents
⚠️ This page may combine multiple inventors who share the name “SCHILLKE FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

5 patents
US7605926B1Oct 20, 2009

Optical system, method of manufacturing an optical system and method of manufacturing an optical element

ZEISS CARL SMT AG47 citations92
US7061626B1Jun 13, 2006

Method of manufacturing an optical element using a hologram

ZEISS CARL SMT AG29 citations92
US7728987B2Jun 1, 2010

Method of manufacturing an optical element

ZEISS CARL SMT AG10 citations83
US6831794B2Dec 14, 2004

Objective with at least one aspheric lens

ZEISS CARL SMT AG15 citations83
US7133225B1Nov 7, 2006

Method of manufacturing an optical system

ZEISS CARL SMT AG7 citations67

ZEISS CARL SMT GMBH

1 patent
US8345262B2Jan 1, 2013

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

ZEISS CARL SMT GMBH8 citations82

HETZLER JOCHEN

1 patent
US8089634B2Jan 3, 2012

Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure

HETZLER JOCHEN4 citations71

SCHILLKE FRANK

1 patent
US8104905B2Jan 31, 2012

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

SCHILLKE FRANK5 citations66