Inventor

DREHER MATTHIAS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “DREHER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US8345262B2Jan 1, 2013

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

ZEISS CARL SMT GMBH8 citations82

US11774237B2Oct 3, 2023

Method for calibrating a measuring apparatus

ZEISS CARL SMT GMBH3 citations71

SCHILLKE FRANK

1 patent

US8104905B2Jan 31, 2012

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

SCHILLKE FRANK5 citations66

ZEISS CARL SMT AG

1 patent

US7791737B2Sep 7, 2010

Method and apparatus for interferometrically measuring the shape of a test object

ZEISS CARL SMT AG2 citations60