Inventor
TJANDRA AGUS
US5 patents
⚠️ This page may combine multiple inventors who share the name “TJANDRA AGUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7509035B2Mar 24, 2009
Lamp array for thermal processing exhibiting improved radial uniformity
APPLIED MATERIALS INC37 citations88
US9514968B2Dec 6, 2016
Methods and apparatus for selective oxidation of a substrate
APPLIED MATERIALS INC3 citations72
US8993458B2Mar 31, 2015
Methods and apparatus for selective oxidation of a substrate
APPLIED MATERIALS INC0 citations51