Inventor

TRIVEDI MAYUR

US4 patents

⚠️ This page may combine multiple inventors who share the name “TRIVEDI MAYUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US6444568B1Sep 3, 2002

Method of forming a copper diffusion barrier

NOVELLUS SYSTEMS INC126 citations97

US6593653B2Jul 15, 2003

Low leakage current silicon carbonitride prepared using methane, ammonia and silane for copper diffusion barrier, etchstop and passivation applications

NOVELLUS SYSTEMS INC48 citations94

APPLIED MATERIALS INC

2 patents

US9431267B2Aug 30, 2016

Semiconductor device processing tools and methods for patterning substrates

APPLIED MATERIALS INC2 citations57

US9869024B2Jan 16, 2018

Methods and apparatus for depositing a cobalt layer using a carousel batch deposition reactor

APPLIED MATERIALS INC0 citations48