Inventor

HIMORI YOSUKE

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HIMORI YOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

2 patents

US9947751B2Apr 17, 2018

Semiconductor device and method of manufacturing the same

TOSHIBA KK6 citations82

US11011609B2May 18, 2021

Method of manufacturing a semiconductor device

TOSHIBA KK0 citations61

EBARA CORP

2 patents

US12033847B2Jul 9, 2024

Cleaning module, substrate processing apparatus including cleaning module, and cleaning method

EBARA CORP0 citations57

US12154797B2Nov 26, 2024

Substrate processing method and substrate processing apparatus

EBARA CORP0 citations49

SHIBAURA MECHATRONICS CORP

1 patent

US9795999B2Oct 24, 2017

Substrate processing apparatus and substrate processing method

SHIBAURA MECHATRONICS CORP2 citations70