Inventor

VALEFI MAHDIAR

NL5 patents

Patents

5 patents

USRE50785EFeb 3, 2026

Lithographic apparatus substrate table and method of loading a substrate

ASML NETHERLANDS BV0 citations59

US10236203B2Mar 19, 2019

Lithographic apparatus substrate table and method of loading a substrate

ASML NETHERLANDS BV1 citations59

US11567399B2Jan 31, 2023

EUV pellicles

ASML NETHERLANDS BV0 citations55

US11237475B2Feb 1, 2022

EUV pellicles

ASML NETHERLANDS BV0 citations55

US12072620B2Aug 27, 2024

Method of manufacturing a membrane assembly

ASML NETHERLANDS BV0 citations48