Inventor
ROSE GARRY A
US3 patents
Patents
3 patentsUS9573111B1Feb 21, 2017
High purity ozone generator for optics cleaning and recovery
KLA TENCOR CORP3 citations66
US10692692B2Jun 23, 2020
System and method for providing a clean environment in an electron-optical system
KLA TENCOR CORP1 citations59
US9842724B2Dec 12, 2017
Method and system for imaging of a photomask through a pellicle
KLA TENCOR CORP1 citations48