Inventor

DELGADO GILDARDO R

US24 patents

⚠️ This page may combine multiple inventors who share the name “DELGADO GILDARDO R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DELGADO GILDARDO R

KLA TENCOR CORP

Ruthenium encapsulated photocathode electron emitter

Boron-based capping layers for EUV optics

High purity ozone generator for optics cleaning and recovery

Laser-sustained plasma light source

Laser-sustained plasma light source

Electron beam generation and measurement

Photocathode designs and methods of generating an electron beam using a photocathode

Methods and apparatus for use with extreme ultraviolet light having contamination protection

Photocathode emitter system that generates multiple electron beams

Photocathode designs and methods of generating an electron beam using a photocathode

Metal encapsulated photocathode electron emitter

Silicon electron emitter designs

Electron beam emitters with ruthenium coating

High brightness boron-containing electron beam emitters for use in a vacuum environment

Metal protective layer for electron emitters with a diffusion barrier

Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation

Particle and chemical control using tunnel flow

KLA CORP

Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Vacuum actuator containment for molecular contaminant and particle mitigation

Plasmonic photocathode emitters

DELGADO GILDARDO R

Broadband plasma light sources for substrate processing

Particle control near reticle and optics using showerhead

BEZEL ILYA

Laser-sustained plasma light source

KLA TENCOR TECH CORP

Broadband plasma light sources with cone-shaped electrode for substrate processing