Inventor
BUIS EDWIN JOHAN
NL25 patents
⚠️ This page may combine multiple inventors who share the name “BUIS EDWIN JOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS6831285B2Dec 14, 2004
Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations82
US7307689B2Dec 11, 2007
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing
ASML NETHERLANDS BV10 citations78
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US6937316B2Aug 30, 2005
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations63
US7700930B2Apr 20, 2010
Lithographic apparatus with rotation filter device
ASML NETHERLANDS BV2 citations62
US7492440B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7224429B2May 29, 2007
Lithographic apparatus, device manufacturing method and positioning system
ASML NETHERLANDS BV3 citations62
US7088428B2Aug 8, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7602472B2Oct 13, 2009
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
ASML NETHERLANDS BV2 citations61
US12139436B2Nov 12, 2024
Droplet generator nozzle
ASML NETHERLANDS BV0 citations54
US7518705B2Apr 14, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7629593B2Dec 8, 2009
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
ASML NETHERLANDS BV0 citations41
US9494878B2Nov 15, 2016
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations40
DE VRIES GOSSE CHARLES
3 patentsUS8724081B2May 13, 2014
Lithographic apparatus and method
DE VRIES GOSSE CHARLES1 citations50
US8634062B2Jan 21, 2014
Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method
DE VRIES GOSSE CHARLES1 citations50
US8867021B2Oct 21, 2014
Illumination system, lithographic apparatus and method of adjusting an illumination mode
DE VRIES GOSSE CHARLES0 citations48
BUIS EDWIN JOHAN
3 patentsUS8757823B2Jun 24, 2014
Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same
BUIS EDWIN JOHAN0 citations48
US8817232B2Aug 26, 2014
Optical apparatus, and method of orienting a reflective element
BUIS EDWIN JOHAN1 citations47
US8279408B2Oct 2, 2012
Object support positioning device and lithographic apparatus
BUIS EDWIN JOHAN0 citations38