Inventor

SCHWENK CHRISTOF

DE4 patents

Patents

4 patents

US12031820B2Jul 9, 2024

Micromechanical system, method for operating a micromechanical system

BOSCH GMBH ROBERT0 citations57

US12404170B2Sep 2, 2025

Method for producing a bonding pad for a micromechanical sensor element

BOSCH GMBH ROBERT0 citations44

US12094717B2Sep 17, 2024

Method for forming a trench in a first semiconductor layer of a multi-layer system

BOSCH GMBH ROBERT0 citations41

US10059583B2Aug 28, 2018

Micro-mechanical component

BOSCH GMBH ROBERT0 citations34