Inventor

PARK JIN GOO

KR4 patents

⚠️ This page may combine multiple inventors who share the name “PARK JIN GOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEXAS INSTRUMENTS INC

1 patent

US5803980ASep 8, 1998

De-ionized water/ozone rinse post-hydrofluoric processing for the prevention of silicic acid residue

TEXAS INSTRUMENTS INC21 citations89

NYMTECH CO LTD

1 patent

US6866784B2Mar 15, 2005

Slurry recycling system and method for CMP apparatus

NYMTECH CO LTD28 citations84

EBARA CORP

1 patent

US11382412B2Jul 12, 2022

Method and apparatus for cleaning PVA brush

EBARA CORP1 citations60

SAMSUNG ELECTRONICS CO LTD

1 patent

US12032281B2Jul 9, 2024

Pellicle cleaning apparatus and pellicle cleaning method using the same

SAMSUNG ELECTRONICS CO LTD0 citations49