Inventor

YOSHINO YU

JP7 patents

⚠️ This page may combine multiple inventors who share the name “YOSHINO YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US12172198B2Dec 24, 2024

Gas cluster processing device and gas cluster processing method

TOKYO ELECTRON LTD0 citations58

US11267021B2Mar 8, 2022

Gas cluster processing device and gas cluster processing method

TOKYO ELECTRON LTD0 citations58

DOBASHI KAZUYA

1 patent

US9214364B2Dec 15, 2015

Substrate cleaning apparatus and vacuum processing system

DOBASHI KAZUYA3 citations57

KOIKE KUNIHIKO

1 patent

US8461051B2Jun 11, 2013

Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component

KOIKE KUNIHIKO0 citations48

DISCO CORP

1 patent

US9159622B2Oct 13, 2015

Dividing method for wafer

DISCO CORP1 citations44

IWATANI CORP

1 patent

US9533268B2Jan 3, 2017

Method and apparatus for supplying mixed gas

IWATANI CORP0 citations34

YOSHINO YU

1 patent

US9416445B2Aug 16, 2016

Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride

YOSHINO YU0 citations30