Inventor
SUN FENGPEI
CN3 patents
Patents
3 patentsUS12473196B2Nov 18, 2025
MEMS chip, manufacturing method thereof, MEMS device, and electronic device
HUAWEI TECH CO LTD0 citations44
US12523863B2Jan 13, 2026
Electrostatic MEMS micromirror
HUAWEI TECH CO LTD0 citations42
US12445221B2Oct 14, 2025
Tunable optical add/drop multiplexer
HUAWEI TECH CO LTD0 citations38