Inventor
HINKLE LUKE D
US6 patents
Patents
6 patentsUS5966499AOct 12, 1999
System for delivering a substantially constant vapor flow to a chemical process reactor
MKS INSTR INC115 citations96
US5684245ANov 4, 1997
Apparatus for mass flow measurement of a gas
MKS INSTR INC146 citations96
US5515711AMay 14, 1996
Pressure measurement and calibration apparatus using gravity-induced diaphragm deflection
MKS INSTR INC44 citations91
US5142907ASep 1, 1992
Constant temperature gradient fluid mass flow transducer
MKS INSTR INC23 citations91
US6443015B1Sep 3, 2002
Baffle for a capacitive pressure sensor
MKS INSTR INC35 citations88
US5461913AOct 31, 1995
Differential current thermal mass flow transducer
MKS INSTR INC48 citations86