Inventor

OMIYA MAKOTO

JP3 patents

Patents

3 patents

USD343630SJan 25, 1994

Industrial robot

NEC CORP31 citations89

US6733848B2May 11, 2004

Thin film forming equipment and method

NEC CORP2 citations60

US6336975B1Jan 8, 2002

Thin film forming equipment and method

NEC CORP4 citations60