Inventor
BROEKAART MARCEL
FR38 patents
⚠️ This page may combine multiple inventors who share the name “BROEKAART MARCEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SOITEC SILICON ON INSULATOR
28 patentsUS11711065B2Jul 25, 2023
Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
SOITEC SILICON ON INSULATOR5 citations85
US11800803B2Oct 24, 2023
Hybrid structure for a surface acoustic wave device
SOITEC SILICON ON INSULATOR2 citations73
US10924081B2Feb 16, 2021
Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
SOITEC SILICON ON INSULATOR1 citations73
US10608610B2Mar 31, 2020
Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
SOITEC SILICON ON INSULATOR3 citations73
US9583531B2Feb 28, 2017
Process for transferring circuit layer
SOITEC SILICON ON INSULATOR2 citations68
US9138980B2Sep 22, 2015
Apparatus for manufacturing semiconductor devices
SOITEC SILICON ON INSULATOR3 citations63
US12588414B2Mar 24, 2026
Hybrid structure for a surface acoustic wave device
SOITEC SILICON ON INSULATOR0 citations62
US12272540B2Apr 8, 2025
Method for manufacturing a substrate
SOITEC SILICON ON INSULATOR0 citations62
US12165900B2Dec 10, 2024
Method of mechanical separation for a double layer transfer
SOITEC SILICON ON INSULATOR0 citations62
US12143093B2Nov 12, 2024
Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
SOITEC SILICON ON INSULATOR0 citations62
US11837463B2Dec 5, 2023
Method for manufacturing a substrate
SOITEC SILICON ON INSULATOR0 citations62
US11742233B2Aug 29, 2023
Method of mechanical separation for a double layer transfer
SOITEC SILICON ON INSULATOR0 citations62
US10943778B2Mar 9, 2021
Method for manufacturing a substrate
SOITEC SILICON ON INSULATOR0 citations62
US10910250B2Feb 2, 2021
Method of mechanical separation for a double layer transfer
SOITEC SILICON ON INSULATOR0 citations62
US11373856B2Jun 28, 2022
Support for a semiconductor structure
SOITEC SILICON ON INSULATOR0 citations60
US10297464B2May 21, 2019
Process for the manufacture of a semiconductor element comprising a layer for trapping charges
SOITEC SILICON ON INSULATOR1 citations57
US12183624B2Dec 31, 2024
Process for producing a receiver substrate for a semiconductor-on-insulator structure for radiofrequency applications and process for producing such a structure
SOITEC SILICON ON INSULATOR0 citations56
US12525483B2Jan 13, 2026
Method for transferring a thin layer onto a support substrate provided with a charge-trapping layer
SOITEC SILICON ON INSULATOR0 citations52
US9953855B2Apr 24, 2018
Process for transferring layers
SOITEC SILICON ON INSULATOR0 citations52
US8871611B2Oct 28, 2014
Method for molecular adhesion bonding at low pressure
SOITEC SILICON ON INSULATOR0 citations52
US8357589B2Jan 22, 2013
Method of thinning a structure
SOITEC SILICON ON INSULATOR0 citations52
US12230533B2Feb 18, 2025
Method for manufacturing a semiconductor-on-insulator substrate
SOITEC SILICON ON INSULATOR0 citations51
US11088016B2Aug 10, 2021
Method for locating devices
SOITEC SILICON ON INSULATOR0 citations50
US9905531B2Feb 27, 2018
Method for producing composite structure with metal/metal bonding
SOITEC SILICON ON INSULATOR1 citations50
US10819282B2Oct 27, 2020
Method for minimizing distortion of a signal in a radiofrequency circuit
SOITEC SILICON ON INSULATOR0 citations48
US11373898B2Jun 28, 2022
Method for manufacturing a semiconductor on insulator type structure by layer transfer
SOITEC SILICON ON INSULATOR0 citations47
US9548202B2Jan 17, 2017
Method for bonding by means of molecular adhesion
SOITEC SILICON ON INSULATOR0 citations41
US10510531B2Dec 17, 2019
Method of fabrication of a semiconductor element comprising a highly resistive substrate
SOITEC SILICON ON INSULATOR0 citations39
BROEKAART MARCEL
5 patentsUS8575002B2Nov 5, 2013
Direct bonding method with reduction in overlay misalignment
BROEKAART MARCEL26 citations91
US8679944B2Mar 25, 2014
Progressive trimming method
BROEKAART MARCEL17 citations79
US9733075B2Aug 15, 2017
System and method for assessing inhomogeneous deformations in multilayer plates
BROEKAART MARCEL3 citations69
US8338266B2Dec 25, 2012
Method for molecular adhesion bonding at low pressure
BROEKAART MARCEL2 citations61
US8232130B2Jul 31, 2012
Process for assembling wafers by means of molecular adhesion
BROEKAART MARCEL0 citations46
CASTEX ARNAUD
4 patentsUS8202785B2Jun 19, 2012
Surface treatment for molecular bonding
CASTEX ARNAUD19 citations91
US9004135B2Apr 14, 2015
Method and apparatus for bonding together two wafers by molecular adhesion
CASTEX ARNAUD9 citations82
US8163570B2Apr 24, 2012
Method of initiating molecular bonding
CASTEX ARNAUD11 citations82
US8932938B2Jan 13, 2015
Method of fabricating a multilayer structure with circuit layer transfer
CASTEX ARNAUD2 citations61