Inventor
PARTLO WILLIAM NORMAN
US3 patents
Patents
3 patentsUS5771258AJun 23, 1998
Aerodynamic chamber design for high pulse repetition rate excimer lasers
CYMER INC187 citations95
US5763930AJun 9, 1998
Plasma focus high energy photon source
CYMER INC192 citations95
US5818865AOct 6, 1998
Compact excimer laser insulator with integral pre-ionizer
CYMER INC64 citations91