Inventor
TRIBULA DANA
US6 patents
⚠️ This page may combine multiple inventors who share the name “TRIBULA DANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6399489B1Jun 4, 2002
Barrier layer deposition using HDP-CVD
APPLIED MATERIALS INC110 citations97
US6713390B2Mar 30, 2004
Barrier layer deposition using HDP-CVD
APPLIED MATERIALS INC62 citations95
US6410457B1Jun 25, 2002
Method for improving barrier layer adhesion to HDP-FSG thin films
APPLIED MATERIALS INC17 citations92
US6599574B1Jul 29, 2003
Method and apparatus for forming a dielectric film using helium as a carrier gas
APPLIED MATERIALS INC25 citations91
US6803325B2Oct 12, 2004
Apparatus for improving barrier layer adhesion to HDP-FSG thin films
APPLIED MATERIALS INC12 citations73