Inventor
MOISE IV THEODORE S
US8 patents
Patents
8 patentsUS6528386B1Mar 4, 2003
Protection of tungsten alignment mark for FeRAM processing
TEXAS INSTRUMENTS INC84 citations98
US7935543B2May 3, 2011
Method of forming PZT ferroelectric capacitors for integrated circuits
TEXAS INSTRUMENTS INC20 citations92
US7220600B2May 22, 2007
Ferroelectric capacitor stack etch cleaning methods
TEXAS INSTRUMENTS INC35 citations92
US6828161B2Dec 7, 2004
Method of forming an FeRAM having a multi-layer hard mask and patterning thereof
TEXAS INSTRUMENTS INC25 citations92
US6635498B2Oct 21, 2003
Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch
TEXAS INSTRUMENTS INC48 citations92
US6984857B2Jan 10, 2006
Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same
TEXAS INSTRUMENTS INC37 citations89
US6773930B2Aug 10, 2004
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier
TEXAS INSTRUMENTS INC32 citations89
US6660612B1Dec 9, 2003
Design to prevent tungsten oxidation at contact alignment in FeRAM
TEXAS INSTRUMENTS INC30 citations89