Inventor

KELEHER JASON

US7 patents

⚠️ This page may combine multiple inventors who share the name “KELEHER JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FERRO CORP

2 patents

US6660639B2Dec 9, 2003

Method of fabricating a copper damascene structure

FERRO CORP16 citations91

US6508953B1Jan 21, 2003

Slurry for chemical-mechanical polishing copper damascene structures

FERRO CORP18 citations91

CABOT MICROELECTRONICS CORP

2 patents

US7955520B2Jun 7, 2011

Copper-passivating CMP compositions and methods

CABOT MICROELECTRONICS CORP9 citations83

US7456107B2Nov 25, 2008

Compositions and methods for CMP of low-k-dielectric materials

CABOT MICROELECTRONICS CORP15 citations78

PPG IND OHIO INC

1 patent

US6656241B1Dec 2, 2003

Silica-based slurry

PPG IND OHIO INC61 citations93

KELEHER JASON

1 patent

US8435421B2May 7, 2013

Metal-passivating CMP compositions and methods

KELEHER JASON45 citations90

PERSEE CHEMICAL CO LTD

1 patent

US6916428B2Jul 12, 2005

Photo-chemical remediation of Cu-CMP waste

PERSEE CHEMICAL CO LTD3 citations58