Inventor

DALRYMPLE ALICE MADRONE

US2 patents

Patents

2 patents

US7235154B2Jun 26, 2007

Devices and methods for optical endpoint detection during semiconductor wafer polishing

STRASBAUGH6 citations62

US7549909B2Jun 23, 2009

Methods for optical endpoint detection during semiconductor wafer polishing

STRASBAUGH0 citations41