Inventor
PENDER JEREMIAH T P
US11 patents
⚠️ This page may combine multiple inventors who share the name “PENDER JEREMIAH T P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS8980758B1Mar 17, 2015
Methods for etching an etching stop layer utilizing a cyclical etching process
APPLIED MATERIALS INC192 citations98
US7575007B2Aug 18, 2009
Chamber recovery after opening barrier over copper
APPLIED MATERIALS INC197 citations98
US7620511B2Nov 17, 2009
Method for determining plasma characteristics
APPLIED MATERIALS INC14 citations91
US7300597B2Nov 27, 2007
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material
APPLIED MATERIALS INC18 citations91
US7848898B2Dec 7, 2010
Method for monitoring process drift using plasma characteristics
APPLIED MATERIALS INC11 citations83
US7309448B2Dec 18, 2007
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material
APPLIED MATERIALS INC10 citations82
US7286948B1Oct 23, 2007
Method for determining plasma characteristics
APPLIED MATERIALS INC9 citations72
US9299577B2Mar 29, 2016
Methods for etching a dielectric barrier layer in a dual damascene structure
APPLIED MATERIALS INC2 citations62
US7440859B2Oct 21, 2008
Method for determining plasma characteristics
APPLIED MATERIALS INC2 citations61