Inventor

MAWARI TARREG

US4 patents

Patents

4 patents

US7620511B2Nov 17, 2009

Method for determining plasma characteristics

APPLIED MATERIALS INC14 citations91

US7848898B2Dec 7, 2010

Method for monitoring process drift using plasma characteristics

APPLIED MATERIALS INC11 citations83

US7286948B1Oct 23, 2007

Method for determining plasma characteristics

APPLIED MATERIALS INC9 citations72

US7440859B2Oct 21, 2008

Method for determining plasma characteristics

APPLIED MATERIALS INC2 citations61