Inventor

AUER-JONGEPIER SUZAN LEONIE

NL5 patents

⚠️ This page may combine multiple inventors who share the name “AUER-JONGEPIER SUZAN LEONIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US6879866B2Apr 12, 2005

Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system

ASML NETHERLANDS BV37 citations85

US7145643B2Dec 5, 2006

Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method

ASML NETHERLANDS BV11 citations79

US7679714B2Mar 16, 2010

Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method

ASML NETHERLANDS BV0 citations49

US7817241B2Oct 19, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations39

AUER-JONGEPIER SUZAN LEONIE

1 patent

US8634052B2Jan 21, 2014

Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table

AUER-JONGEPIER SUZAN LEONIE3 citations52