Inventor
YAMASE RYAN
US3 patents
Patents
3 patentsUS8563095B2Oct 22, 2013
Silicon nitride passivation layer for covering high aspect ratio features
RAJAGOPALAN NAGARAJAN11 citations81
US8329575B2Dec 11, 2012
Fabrication of through-silicon vias on silicon wafers
RAJAGOPALAN NAGARAJAN6 citations81
US8283237B2Oct 9, 2012
Fabrication of through-silicon vias on silicon wafers
RAJAGOPALAN NAGARAJAN11 citations81