Inventor
TSUGAO KEISUKE
JP5 patents
Patents
5 patentsUS12582942B2Mar 24, 2026
Gas processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD0 citations48
US10128132B2Nov 13, 2018
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations47
US9842747B2Dec 12, 2017
Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method
TOKYO ELECTRON LTD0 citations47
US12377384B2Aug 5, 2025
Substrate processing apparatus and control method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations45
US10022758B2Jul 17, 2018
Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus
TOKYO ELECTRON LTD1 citations41