Inventor

MIZUUCHI KEISUKE

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MIZUUCHI KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIMBA TOSHIFUMI

2 patents

US8280664B2Oct 2, 2012

XY-coordinate compensation apparatus and method in sample pattern inspection apparatus

KIMBA TOSHIFUMI8 citations81

US8639463B2Jan 28, 2014

Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams

KIMBA TOSHIFUMI4 citations70

EBARA CORP

1 patent

US9136091B2Sep 15, 2015

Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams

EBARA CORP4 citations70