Inventor
AN ZENG ANDREW
US2 patents
Patents
2 patentsUS9163928B2Oct 20, 2015
Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer
KLA TENCOR CORP3 citations57
US9903708B2Feb 27, 2018
Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate
KLA TENCOR CORP0 citations46