Inventor
KAWAMATA MASAYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KAWAMATA MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS9202707B2Dec 1, 2015
Semiconductor device manufacturing method
TOKYO ELECTRON LTD5 citations71
US9887109B2Feb 6, 2018
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations51
US9583361B2Feb 28, 2017
Method of processing target object and plasma processing apparatus
TOKYO ELECTRON LTD0 citations40
US9502219B2Nov 22, 2016
Plasma processing method
TOKYO ELECTRON LTD0 citations40