Inventor
YANG SHUN-SHING
TW15 patents
⚠️ This page may combine multiple inventors who share the name “YANG SHUN-SHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS9870443B2Jan 16, 2018
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD26 citations93
US9917006B1Mar 13, 2018
Method of planarizating film
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10990744B2Apr 27, 2021
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10269818B2Apr 23, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11812608B2Nov 7, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11748549B2Sep 5, 2023
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11665897B2May 30, 2023
Improving surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11276699B2Mar 15, 2022
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11004858B2May 11, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10522557B2Dec 31, 2019
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10366916B2Jul 30, 2019
Integrated circuit structure with guard ring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9929167B2Mar 27, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51