Inventor
JUSSILA HENRI
FI6 patents
Patents
6 patentsUS12237171B1Feb 25, 2025
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations74
US11885013B2Jan 30, 2024
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations72
US11393690B2Jul 19, 2022
Deposition method
ASM IP HOLDING BV3 citations71
US12119228B2Oct 15, 2024
Deposition method
ASM IP HOLDING BV1 citations61
US11908736B2Feb 20, 2024
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV0 citations61
US12359315B2Jul 15, 2025
Deposition of oxides and nitrides
ASM IP HOLDING BV0 citations51