Inventor

NA KYOUNGCHO

KR2 patents

Patents

2 patents

US12414289B1Sep 9, 2025

Semiconductor devices having air spacer

SAMSUNG ELECTRONICS CO LTD0 citations53

US12493246B2Dec 9, 2025

Overlay measurement method, semiconductor device manufacturing method using the same, and overlay measurement apparatus

SAMSUNG ELECTRONICS CO LTD0 citations52