Inventor

YU CHARLES CHUNZHE

US2 patents

Patents

2 patents

US6265115B1Jul 24, 2001

Projection lithography photomask blanks, preforms and methods of making

CORNING INC27 citations90

US6783898B2Aug 31, 2004

Projection lithography photomask blanks, preforms and method of making

CORNING INC12 citations71