Inventor
PASADYN ALEXANDER JAMES
US2 patents
Patents
2 patentsUS6988017B2Jan 17, 2006
Adaptive sampling method for improved control in semiconductor manufacturing
ADVANCED MICRO DEVICES INC122 citations95
US6969672B1Nov 29, 2005
Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operation
ADVANCED MICRO DEVICES INC11 citations63