Inventor
BEYER KLAUS DIETRICH
US5 patents
Patents
5 patentsUS5729039AMar 17, 1998
SOI transistor having a self-aligned body contact
IBM100 citations97
US5962895AOct 5, 1999
SOI transistor having a self-aligned body contact
IBM31 citations92
US4110125AAug 29, 1978
Method for fabricating semiconductor devices
IBM26 citations79
US7183175B2Feb 27, 2007
Shallow trench isolation structure for strained Si on SiGe
IBM5 citations61
US5965459AOct 12, 1999
Method for removing crevices induced by chemical-mechanical polishing
IBM4 citations60