Inventor
DING-LEE SHUJI S
US3 patents
Patents
3 patentsUS7824837B2Nov 2, 2010
Positive-working photoimageable bottom antireflective coating
AZ ELECTRONIC MATERIALS USA54 citations95
US8039202B2Oct 18, 2011
Positive-working photoimageable bottom antireflective coating
AZ ELECTRONIC MATERIALS USA11 citations81
US7470500B2Dec 30, 2008
Organic bottom antireflective polymer compositions
AZ ELECTRONIC MATERIALS USA11 citations81