Inventor

HELLY PATRICK J

US2 patents

⚠️ This page may combine multiple inventors who share the name “HELLY PATRICK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LINDE INC

1 patent

US7514119B2Apr 7, 2009

Method and apparatus for using solution based precursors for atomic layer deposition

LINDE INC16 citations78

BOC GROUP INC

1 patent

US6444013B1Sep 3, 2002

Purification of methylsilanes

BOC GROUP INC6 citations69