Inventor
SOETARMAN RONNY
US29 patents
⚠️ This page may combine multiple inventors who share the name “SOETARMAN RONNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZETA INSTR INC
9 patentsUS10094787B2Oct 9, 2018
Multi-surface specular reflection inspector
ZETA INSTR INC4 citations73
US9921169B2Mar 20, 2018
Method of detecting defect location using multi-surface specular reflection
ZETA INSTR INC4 citations73
US10157457B2Dec 18, 2018
Optical measurement of opening dimensions in a wafer
ZETA INSTR INC4 citations68
US10168524B2Jan 1, 2019
Optical measurement of bump hieght
ZETA INSTR INC1 citations62
US10338009B2Jul 2, 2019
Method and apparatus to detect defects in transparent solids
ZETA INSTR INC0 citations52
US9784691B2Oct 10, 2017
Method and apparatus to optically detect defects in transparent solids
ZETA INSTR INC0 citations52
US10209501B2Feb 19, 2019
3D microscope and methods of measuring patterned substrates
ZETA INSTR INC0 citations50
US10769769B2Sep 8, 2020
Dual mode inspector
ZETA INSTR INC0 citations41
US10359613B2Jul 23, 2019
Optical measurement of step size and plated metal thickness
ZETA INSTR INC0 citations34
KLA TENCOR CORP
6 patentsUS7532318B2May 12, 2009
Wafer edge inspection
KLA TENCOR CORP10 citations82
US7630086B2Dec 8, 2009
Surface finish roughness measurement
KLA TENCOR CORP17 citations79
US11536940B2Dec 27, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP2 citations72
US12265212B2Apr 1, 2025
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US11294161B2Apr 5, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US10884228B2Jan 5, 2021
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
CANDELA INSTR
4 patentsUS6268919B1Jul 31, 2001
System and method for measuring thin film properties and analyzing two-dimensional histograms using and/not operations
CANDELA INSTR47 citations96
US6229610B1May 8, 2001
System and method for measuring thin film properties and analyzing two-dimensional histograms using substraction operation
CANDELA INSTR33 citations96
US6130749AOct 10, 2000
System and method for measuring thin film properties and analyzing two-dimensional histograms using a symmetry operation
CANDELA INSTR40 citations96
US6031615AFeb 29, 2000
System and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughness
CANDELA INSTR74 citations96