Inventor
LEE KEN KINSUN
US16 patents
⚠️ This page may combine multiple inventors who share the name “LEE KEN KINSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZETA INSTR INC
6 patentsUS7944609B2May 17, 2011
3-D optical microscope
ZETA INSTR INC14 citations91
US7729049B2Jun 1, 2010
3-d optical microscope
ZETA INSTR INC37 citations91
US10157457B2Dec 18, 2018
Optical measurement of opening dimensions in a wafer
ZETA INSTR INC4 citations68
US10209501B2Feb 19, 2019
3D microscope and methods of measuring patterned substrates
ZETA INSTR INC0 citations50
US9664888B2May 30, 2017
Multi-surface optical 3D microscope
ZETA INSTR INC0 citations47
US9645381B2May 9, 2017
Multi-surface optical 3D microscope
ZETA INSTR INC0 citations47
XU JAMES JIANGUO
4 patentsUS10048480B2Aug 14, 2018
3D microscope including insertable components to provide multiple imaging and measurement capabilities
XU JAMES JIANGUO4 citations82
US8184364B2May 22, 2012
Illuminator for a 3-D optical microscope
XU JAMES JIANGUO7 citations82
US8174762B2May 8, 2012
3-D optical microscope
XU JAMES JIANGUO13 citations82
US8976366B2Mar 10, 2015
System and method for monitoring LED chip surface roughening process
XU JAMES JIANGUO0 citations40
KLA TENCOR CORP
4 patentsUS11536940B2Dec 27, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP2 citations72
US12265212B2Apr 1, 2025
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US11294161B2Apr 5, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US10884228B2Jan 5, 2021
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62