Inventor

ABESHAUS JOSHUA M

US3 patents

Patents

3 patents

US11213891B2Jan 4, 2022

Semiconductor manufacturing device with embedded fluid conduits

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations56

US10486232B2Nov 26, 2019

Semiconductor manufacturing device with embedded fluid conduits

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations56

US10418223B1Sep 17, 2019

Foil sheet assemblies for ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations55