Inventor

TERAUCHI HIROMITSU

JP3 patents

Patents

3 patents

US9711375B2Jul 18, 2017

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP9 citations80

US10522333B2Dec 31, 2019

Vacuum processing apparatus

HITACHI HIGH TECH CORP0 citations38

US9831096B2Nov 28, 2017

Plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP0 citations37