Inventor
SONODA YASUSHI
JP10 patents
Patents
10 patentsUSD1008986SDec 26, 2023
Ion shield plate for plasma processing apparatus
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Manufacturing method of three-dimensional semiconductor device
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Plasma processing apparatus and plasma processing method
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US11776792B2Oct 3, 2023
Plasma processing apparatus and plasma processing method
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Plasma processing apparatus
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Plasma processing apparatus
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Gas supply apparatus, vacuum processing apparatus, and gas supply method
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US11387110B2Jul 12, 2022
Plasma processing apparatus and plasma processing method
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US11232932B2Jan 25, 2022
Plasma processing apparatus and plasma processing method
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US10522333B2Dec 31, 2019
Vacuum processing apparatus
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