Inventor

YIM DONG-KIL

US43 patents

⚠️ This page may combine multiple inventors who share the name “YIM DONG-KIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YIM DONG-KIL

APPLIED MATERIALS INC

Detection and suppression of electrical arcing

Detection and suppression of electrical arcing

SiON gradient concept

Low temperature process for TFT fabrication

Low temperature process for TFT fabrication

Nitrogen-rich silicon nitride films for thin film transistors

Nitrogen-rich silicon nitride films for thin film transistors

Oxygen vacancy of IGZO passivation by fluorine treatment

Plasma treatment on metal-oxide TFT

Thin film transistors for circuits for use in display devices

Thin film transistor with small storage capacitor with metal oxide switch

Thin film transistor with small storage capacitor with metal oxide switch

Reducing electrostatic charge by roughening the susceptor

Microcrystalline silicon thin film transistor

Nitrogen-rich silicon nitride films for thin film transistors

Methods for forming an amorphous silicon film in display devices

Moisture barrier film having low refraction index and low water vapor transmission rate

Power loading substrates to reduce particle contamination

Interface engineering for high capacitance capacitor for liquid crystal display

Surface treatment process performed on devices for TFT applications

Methods and apparatuses for depositing amorphous silicon atop metal oxide

Thin-film transistor

Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor

Plasma treatment on metal-oxide TFT

Thin film transistor fabrication utlizing an interface layer on a metal electrode layer

Multilayer passivation or etch stop TFT

Plasma treatment on metal-oxide TFT

Method of IGZO and ZnO TFT fabrication with PECVD SiO2 passivation

Multilayer passivation or etch stop TFT

Pin hole evaluation method of dielectric films for metal oxide semiconductor TFT

Buffer layers for metal oxide semiconductors for TFT

Method for supporting a glass substrate to improve uniform deposition thickness

Transistor devices with multi-layer interlayer dielectric structures

Regeneration anneal of metal oxide thin-film transistors

KURITA SHINICHI

Vertical inline CVD system

Vertical inline CVD system

WON TAE KYUNG

SiOx process chemistry development using microwave plasma CVD

Microcrystalline silicon thin film transistor

YIM DONG-KIL

Methods of manufacturing thin film transistor devices

Power loading substrates to reduce particle contamination

CHOI SOO YOUNG

Particle reduction on surfaces of chemical vapor deposition processing apparatus

CHEN JRJYAN JERRY

Method of IGZO and ZNO TFT fabrication with PECVD SiO2 passivation

PARK BEOM SOO

Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber