Inventor
KUBOTA TOSHIMICHI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “KUBOTA TOSHIMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU DENSHI KINZOKU KK
10 patentsUS5900059AMay 4, 1999
Method and apparatus for fabricating semiconductor single crystal
KOMATSU DENSHI KINZOKU KK53 citations95
US5968262AOct 19, 1999
Method of fabricating silicon single crystals
KOMATSU DENSHI KINZOKU KK65 citations94
US5935326AAug 10, 1999
Apparatus for manufacturing semiconductor single crystals
KOMATSU DENSHI KINZOKU KK21 citations92
US5997635ADec 7, 1999
Method for fabricating a single-crystal semiconductor
KOMATSU DENSHI KINZOKU KK22 citations91
US5853480ADec 29, 1998
Apparatus for fabricating a single-crystal semiconductor
KOMATSU DENSHI KINZOKU KK33 citations91
US5824152AOct 20, 1998
Semiconductor single-crystal pulling apparatus
KOMATSU DENSHI KINZOKU KK20 citations91
US6071341AJun 6, 2000
Apparatus for fabricating single-crystal silicon
KOMATSU DENSHI KINZOKU KK11 citations73
US5948159ASep 7, 1999
Method of controlling defects of a silicon single crystal
KOMATSU DENSHI KINZOKU KK3 citations62
US6030450AFeb 29, 2000
Method of fabricating a silicon single crystal
KOMATSU DENSHI KINZOKU KK3 citations61
US5968260AOct 19, 1999
Method for fabricating a single-crystal semiconductor
KOMATSU DENSHI KINZOKU KK3 citations60
NARUSHIMA YASUHITO
9 patentsUS8518180B2Aug 27, 2013
Silicon single crystal pull-up apparatus having a sliding sample tube
NARUSHIMA YASUHITO6 citations72
US8580032B2Nov 12, 2013
Method for manufacturing single crystal
NARUSHIMA YASUHITO3 citations61
US8283241B2Oct 9, 2012
Dopant implanting method and doping apparatus
NARUSHIMA YASUHITO3 citations61
US10294583B2May 21, 2019
Producing method and apparatus of silicon single crystal, and silicon single crystal ingot
NARUSHIMA YASUHITO1 citations58
US8920561B2Dec 30, 2014
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt
NARUSHIMA YASUHITO1 citations51
US8840721B2Sep 23, 2014
Method of manufacturing silicon single crystal
NARUSHIMA YASUHITO1 citations51
US8535439B2Sep 17, 2013
Manufacturing method for silicon single crystal
NARUSHIMA YASUHITO1 citations51
US8715416B2May 6, 2014
Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus
NARUSHIMA YASUHITO0 citations40
US8110042B2Feb 7, 2012
Method for manufacturing single crystal
NARUSHIMA YASUHITO0 citations36
SUMCO TECHXIV CORP
5 patentsUS10227710B2Mar 12, 2019
Manufacturing method of silicon monocrystal
SUMCO TECHXIV CORP4 citations71
US10233562B2Mar 19, 2019
Method for producing single crystal, and method for producing silicon wafer
SUMCO TECHXIV CORP1 citations61
US8852340B2Oct 7, 2014
Method for manufacturing single crystal
SUMCO TECHXIV CORP1 citations51
US8747551B2Jun 10, 2014
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate
SUMCO TECHXIV CORP0 citations51
US8043428B2Oct 25, 2011
Process for production of silicon single crystal
SUMCO TECHXIV CORP1 citations51
KAWAZOE SHINICHI
5 patentsUS8574363B2Nov 5, 2013
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate
KAWAZOE SHINICHI5 citations71
US9074298B2Jul 7, 2015
Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot
KAWAZOE SHINICHI3 citations61
US8961686B2Feb 24, 2015
Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device
KAWAZOE SHINICHI1 citations50
US8409347B2Apr 2, 2013
Method of dopant injection, N-type silicon single-crystal, doping apparatus and pull-up device
KAWAZOE SHINICHI1 citations50
US9212431B2Dec 15, 2015
Silicon single crystal pulling device and graphite member used therein
KAWAZOE SHINICHI0 citations48
SUMCO CORP
4 patentsUS10100429B2Oct 16, 2018
Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the same
SUMCO CORP4 citations71
US10982350B2Apr 20, 2021
Silicon monocrystal production method
SUMCO CORP1 citations62
US10895018B2Jan 19, 2021
Method for producing silicon single crystal
SUMCO CORP1 citations62
US10329686B2Jun 25, 2019
Method for producing single crystal
SUMCO CORP0 citations40