Inventor
UTO MASAYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “UTO MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
5 patentsUS10100429B2Oct 16, 2018
Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the same
SUMCO CORP4 citations71
US12031231B2Jul 9, 2024
Low resistivity wafer
SUMCO CORP0 citations60
US11598023B2Mar 7, 2023
Low resistivity wafer and method of manufacturing thereof
SUMCO CORP0 citations60
US11047065B2Jun 29, 2021
Method for producing silicon single crystal, heat shield, and single crystal pulling device
SUMCO CORP1 citations60
US10329686B2Jun 25, 2019
Method for producing single crystal
SUMCO CORP0 citations40