Inventor
MAKI JUNNOSUKE
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MAKI JUNNOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS11920240B2Mar 5, 2024
Substrate processing apparatus, state determination method and computer-readable recording medium
TOKYO ELECTRON LTD2 citations69
US8707805B2Apr 29, 2014
Transfer apparatus and transfer method
TOKYO ELECTRON LTD2 citations61
US12431374B2Sep 30, 2025
Information acquisition system and information acquisition method
TOKYO ELECTRON LTD0 citations47
US11201068B2Dec 14, 2021
Heat treatment apparatus, method of managing heat treatment apparatus and storage medium
TOKYO ELECTRON LTD0 citations44
US12176227B2Dec 24, 2024
State determination device, state determination method, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations43